Analysis of silver ion and complexing agent in tin-silver electrodeposition solution

ABSTRACT

The present disclosure relates to methods of monitoring the concentrations of silver ion and complexing agent in tin-silver (SnAg) electrodeposition solutions, and analysis and process control using such methods. Methods can include adding a precipitating agent to an electrodeposition solution including at least tin ions, silver ions, and complexing agent to cause a reaction between at least a portion of the precipitating agent and substantially all of the silver ions (to precipitate silver ions as a precipitant); adding a metallic salt to the electrodeposition solution to cause a reaction with substantially all of the remaining precipitating agent; measuring the endpoint of the silver ion back titration; further adding metallic salt to cause a further reaction with the complexing agent; and measuring the endpoint of the complexing agent titration.

CROSS-REFERENCE TO RELATED APPLICATIONS

This application is a divisional of U.S. application Ser. No. 15/353,424filed on Nov. 16, 2016, the contents of which are hereby incorporated byreference in their entirety and to which priority is claimed.

BACKGROUND OF THE INVENTION Field of the Invention

The present disclosure relates to methods of monitoring theconcentrations of silver ion (Ag⁺) and complexing agent in tin-silver(SnAg) electrodeposition solutions, and analysis and process controlusing such methods.

Description of the Related Art

Historically, certain tin-lead (SnPb) bumps were electrodeposited ontosemiconductor chips to provide electrical interconnections betweenvarious circuitry elements or between integrated circuit devices. Due toenvironmental and health concerns related to lead (Pb), tin-silver(SnAg) was identified as an alternative electrodeposition solutionmaterial. However, certain techniques for electrodeposition of SnAgbumps have posed challenges as a result of the different chemicalproperties of silver as compared to lead, e.g., deposition potential, aswell as their interactions with each other in a plating bath. Inparticular, under most conditions, silver ions (Ag⁺) react with tin(II)ions (Sn²⁺) producing an undesirable precipitant product (SnO₂):

Sn²⁺(aq)+2Ag⁺(aq)+2H₂O(l)→SnO₂(s)+2Ag(s)+4H⁺(aq)  (1)

In order to prevent the undesirable reaction shown in equation (1),and/or to bring the reduction potential of silver closer to that of tin,a complexing agent (also referred to as a complexer or complexant) canbe added to an electrodeposition solution to control the concentrationof silver ions and/or allow silver to better deposit or adsorb onto theintended substrate. (For the purpose of the present disclosure,“complexing agent” and “complexer” are used interchangeably.)

Certain complexing agents that are used generally for tin or tin alloyelectroplating and bump production are known in the art. For example,U.S. Patent Application Publication No. 2015/0267310 discloses a tin ortin alloy electroplating bath comprising an inorganic acid, an organicacid, and a water-soluble salt; a non-ionic surfactant; and levelingagents—with optional additive complexing agent components selected fromthioamide compounds and non-aromatic thiol compounds. A preferred typeof thioamide compound is thiourea.

In the deposition of SnAg bumps, both silver ions and complexing agentare consumed in the process. However, maintaining uniform manufacturingquality of integrated circuit devices can require a suitably constantcomposition, i.e., a suitably constant concentration, of reactants inthe electrodeposition solution bath. Thus, it can be important tomonitor the concentrations of silver ions and complexing agent insolution over the course of the electrodeposition process, and to do soin a safe and simple but accurate way.

Certain, existing methods have been problematic, whether due tomeasuring silver ion concentration, or measuring complexing agentconcentration, or both.

Methods to measure silver ion concentration include atomic absorbancespectroscopy (AAS), inductively coupled plasma spectroscopy (ICP), ortitration of silver ions by bringing the cation out of solution throughprecipitation of an insoluble product, commonly using iodide. However,certain AAS techniques require use of an open flame, which is not besuitable for use inside a semiconductor fabrication facility. ICP hasthe benefit of being an automated process, but it can require expensiveand bulky analyzer equipment coupled with a pre-dilution system.

Methods to measure complexing agents include high performance liquidchromatography (HPLC) or titration of “free complexer,” i.e., complexingagent that is not bonded to silver ions, using a silver-based titrantwith a silver electrode and subsequent calculation, where the totalcomplexing agent concentration is equal to the free complexer insolution plus the complexer amount bound to silver ions. However, HPLCcan be expensive and complicated, and can require use of flammable andhazardous solvents such as methanol or acetonitrile. Measurement of thecomplexing agent using “free complexer” titration can require twoseparate analysis steps, which compounds the likelihood of error,increases overall analysis time, and consumes large amounts ofchemicals.

Certain methods of electrodeposition and/or using titration to monitorconcentrations of metal ions and/or complexing agent duringelectrodeposition are known in the art. For example, U.S. Pat. No.6,890,758 to Shalyt et al., involves determining the concentration ofcitrate complexing agent in an electroless cobalt or nickel plating bathby titration with a standard lanthanum nitrate solution containing asmall, predetermined concentration of free fluoride ions. U.S. Pat. No.7,273,540 to Sonada and Nakamura, discloses an electrolytic platingmethod using plating solutions that include tin, copper, and silverions, and a complexing agent. The patent discloses that control ofconcentrations of the metal ions in the plating solution can be achievedby volumetric techniques, such as oxidation-reduction titration,chelatometric titration, and precipitation titration.

U.S. Pat. No. 8,118,988 to Shalyt et al., teaches a simple titrationmethod involving a single copper ion titrant to determine concentrationsof both copper ions and bath complexing agent in alkaline copperelectroplating baths used to deposit or thicken copper seed layers onsilicon wafers. In this reference, the electrolyte is a chelated coppersolution, and a chelator reagent is added before the titration analysis.U.S. Pat. No. 8,920,623 to Luo et al., discloses techniques forreplenishing tin and its alloying metals in an aqueous electrolyticplating bath using an acidic solution containing stannous oxide. In oneexample, the patent discloses an initial tin/silver alloy electroplatingcomposition. Silver ion concentration was analyzed by AAS, and thecomplexing agent-1-allyl-2-thiourea—was analyzed by reverse titration.

U.S. Patent Application Publication No. U.S. 2012/0138471 teaches anelectroplating apparatus that allows for continuous simultaneouselectroplating of two metals with substantially differentelectrodeposition potentials, such as SnAg alloys. Similarly, U.S.Patent Application Publication No. U.S. 2013/0334052 discloses an alloyplating system that performs continuous electroplating while maintainingsubstantially constant concentrations of plating bath components forextended periods of use. The reference states that concentration of theplating bath components can be monitored using a variety of sensors andtitrations without providing details.

Thus, there remains a need for safe, simple, and inexpensive methodsthat accurately measure the concentrations of silver ions and complexingagent during the electrodeposition of SnAg bumps.

SUMMARY OF THE DISCLOSED SUBJECT MATTER

The disclosed subject matter provides novel techniques for monitoringthe concentrations of Ag⁺ and complexing agent in SnAg electrodepositionsolution, and analysis and process control using such methods.

As embodied herein, an exemplary method of monitoring the concentrationsof silver ions (Ag⁺) and complexing agent in SnAg electrodepositionsolution includes adding a precipitating agent (X⁻) having apredetermined concentration to the electrodeposition solution to cause areaction between at least a portion of the precipitating agent (X⁻) andsubstantially all of the silver ions (Ag⁺) such that the substantiallyall of silver ions (Ag⁺) are precipitated out from the electrodepositionsolution as a precipitant (AgX); adding a metallic salt (Me⁺) ofpredetermined concentration to the electrodeposition solution to cause areaction between at least a portion of the metallic salt (Me⁺) andsubstantially all of the precipitating agent (X⁻) remaining in theelectrodeposition solution that did not react with the silver ions(Ag⁺); measuring the first endpoint of the silver ion (Ag⁺) backtitration; further adding metallic salt (Me⁺) of predeterminedconcentration to the electrodeposition solution to cause a reactionbetween at least a portion of the metallic salt (Me⁺) and substantiallyall of the complexing agent in the electrodeposition solution; andmeasuring the second endpoint of the complexing agent titration.

In certain embodiments, the concentration of silver ions (Ag⁺)originally in the electrodeposition solution can be calculated based onthe first endpoint.

In certain embodiments, the concentration of complexing agent originallyin the electrodeposition solution can be calculated based on the secondendpoint.

In certain embodiments, the precipitating agent has a stronger affinityfor silver ions than the complexing agent. The anion of theprecipitating agent (X⁻) can be selected from the group consisting ofCl⁻, Br⁻, I⁻, PO₄ ³⁻, CN⁻, C₂O₄ ²⁻, S²⁻, F⁻, SO₄ ²⁻, CO₃ ²⁻, or BH₄ ⁻.In one embodiment, the precipitating agent can comprise potassiumiodide, KI.

In certain embodiments, the cation of the metallic salt (Me⁺) isselected from Ag, Fe, In, Th, Sc, Hg, Ga, Lu, VO, Cu, Zn, Al, LA, Mn,Ca, Sr, Mg, Ni, Pb, Cd, or Co. In one embodiment, the cation of themetallic salt (Me⁺) is not a Group I metal. In another embodiment, themetallic salt can comprise silver nitrate, AgNO₃.

In certain embodiments, the first endpoint and the second endpoint aredetermined based on one or more of measuring potential of ion-selectiveelectrode, conductivity, temperature, color spectra, or electrochemicalresponse.

The presently disclosed subject matter further provides apparatus foranalyzing concentrations of silver ions (Ag⁺) and complexing agent of anelectrodeposition solution. In certain embodiments, the disclosedapparatus includes an analysis cell configured to contain an analysissolution, a sampling device, a precipitating agent injector, a titratordevice configured to add a titrant solution of predeterminedconcentration to the analysis solution, a sensor for detecting a changein the analysis solution, and a controller. The controller can includeone or more processors, and be configured to cause the sampling deviceto add a predetermined volume of the electrodeposition solution to theanalysis solution; cause the precipitating agent injector to add aprecipitating agent (X⁻) having a predetermined concentration to theelectrodeposition solution to cause a reaction between at least aportion of the precipitating agent (X⁻) and substantially all of thesilver ions (Ag⁺) in the analysis solution such that the substantiallyall of silver ions (Ag⁺) are precipitated out from the analysis solutionas a precipitant (AgX); cause the titrator device to add a first amountof the titrant solution to the analysis solution to reach a firstendpoint of titration, where the titrant has reacted with substantiallyall of the precipitating agent (X⁻) remaining in the analysis solution;cause the titrator device to further add a second amount of the titrantsolution to the analysis solution to reach a second endpoint oftitration, where the titrant has reacted with substantially all of thecomplexing agent in the analysis solution; and determine the firstendpoint and the second endpoint of titration based on an output of thesensor.

In certain embodiments, the apparatus can measure such changes in theanalysis solution as potential of ion-selective electrode, conductivity,temperature, color, or electrochemical potential. In certainembodiments, the sensor of the disclosed apparatus can include anion-selective electrode, a conductivity sensor, a temperature sensor, ora color spectral sensor. In certain embodiments, the apparatus canfurther include one or more optional inlets. Such optional inlets can beconfigured to introduce a diluent into the analysis cell. In certainembodiments, the diluent can include deionized water. In certainembodiments, the optional inlets can be configured to introduce anoptional reagent into the analysis cell. In certain embodiments, theoptional reagent can be nitric acid, which need not be added at aspecific stoichiometric ratio to other reactants or to theelectrodeposition solution.

The presently disclosed subject matter also provides a process controlsystems that control concentrations of silver ions (Ag⁺) and complexingagent in an electrodeposition solution including at least tin ions,silver ions, and complexing agent. For example, in certain embodiments,a process control system can include an analyzer for determining theconcentrations of silver ions (Ag⁺) and complexing agent; a replenishingsystem for adding one or more agents to the electrodeposition solution;and one or more processors, coupled to the analyzer, the replenishingsystem, and a computer-readable medium containing executableinstructions.

In certain embodiments, the executable instructions, when executed bythe processors, can cause the process control system to determine theconcentrations of silver ions (Ag+) and complexing agent by acquiring asample of the electrodeposition solution, adding of a precipitatingagent (X⁻) having a predetermined concentration to the sample thatcauses the precipitation of substantially all of the silver ions (Ag⁺)as a precipitant (AgX), titrating the precipitating agent (X⁻) thatremains in the sample with a metallic salt (Me⁺); further titrating thecomplexing agent with a metallic salt (Me⁺); and adding one or morereagents to the electrodeposition solution to maintain predeterminedconcentrations of silver ions (Ag⁺) and complexing agent.

Further features and advantages of the presently disclosed subjectmatter will be apparent to those skilled in the art from the followingdetailed description, taken together with the accompanying drawings.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 depicts a method of monitoring the concentrations of silver ion(Ag⁺) and complexing agent in tin-silver (SnAg) electrodepositionsolutions according to one exemplary embodiment of the disclosed subjectmatter.

FIG. 2 shows a titration curve and differentiated titration curve of thepotential of a silver ion-selective electrode as a function of thevolume of metallic salt (Me⁺) titrant solution. This (first) titrationendpoint shows measurement of the concentration of a blank samplesolution containing no silver ions in the plating bath.

FIG. 3 shows a dual-step titration curve and differentiated dual-steptitration curve of the potential of a silver ion-selective electrode asa function of the volume of metallic salt titrant solution. The firstendpoint provides a measure of the silver ion concentration in theplating bath, and the second endpoint provides a measure of the totalcomplexing agent concentration in the plating bath.

FIG. 4 illustrates an exemplary apparatus for monitoring and measuringof the concentrations of silver ions and complexing agent of anelectrodeposition solution.

DETAILED DESCRIPTION

The presently disclosed subject matter provides novel techniques formonitoring the concentrations of silver ions (Ag⁺) and complexing agentin SnAg electrodeposition solution, analysis and process control usingsuch methods. The presently disclosed methods can include a single,dual-step titration technique to determine the concentrations of silverions and complexing agent in an electroplating bath.

Technical terms used in this document are used in a manner as generallyknown to those skilled in the art. The terms “electroplating,”“plating,” and “electrodeposition” refer to metal electrodeposition andare equivalent. The terms “electroplating bath” and “plating bath” areused interchangeably. The term “complexing agent” or “complexer” canrefer to complexation of silver ions.

A “titrant solution” is a standard solution comprising a knownconcentration of a reagent called a “titrant” that chemically reactswith a “reactant” or “unknown species” whose concentration in a samplesolution is to be determined. A “titration” is an analytical procedurebased on stoichiometric reaction(s) involving repeated addition of knownvolume of titrant solution to an analysis solution (comprising thesample solution), coupled with monitoring of a physical or chemicalproperty, such as temperature, potential of ion selective electrode, orconcentration of an indicator species, e.g., titrant, unknown species,or additional reagents employed in the reaction, or the differentialchange of a physical or chemical property.

A “titration curve” is a plot of a physical or chemical property of atitration indicator species in an analysis solution, or a parametercorrelated to such a property, as a function of the volume of titrantsolution added to the analysis solution. It is typically more convenientto utilize a concentration parameter that is proportional to theconcentration of the indicator species, especially when the indicatorspecies participates in a complexation reaction involving competingcomplexing agents. The endpoint for the titration is typicallydetermined from a curve feature corresponding to a rapid change in theconcentration of the indicator species, such as a curve knee orinflection point. Detection of the titration endpoint can be facilitatedby differentiating the titration curve, which converts an inflectionpoint into a peak.

For the purpose of illustration and not limitation, FIG. 1 provides anexemplary method of monitoring the concentrations of silver ions (Ag⁺)and complexing agent in a sample SnAg electrodeposition solution. Themethod can include adding a precipitating agent (X⁻) having apredetermined concentration to the electrodeposition solution to cause areaction between at least a portion of the precipitating agent (X⁻) andsubstantially all of the silver ions (Ag⁺) such that the substantiallyall of silver ions (Ag⁺) are precipitated out from the electrodepositionsolution as a precipitant (AgX) 101. Other optional reagents can also beadded to the electrodeposition solution, such as deionized water (DIW)as a diluent or nitric acid (HNO₃) to aid reaction and sensor response.Next, a metallic salt (Me⁺) of predetermined concentration is added tothe electrodeposition solution to cause a reaction between at least aportion of the metallic salt (Me⁺) and substantially all of theprecipitating agent (X⁻) remaining in the electrodeposition solutionthat did not react with the silver ions (Ag⁺) 102. The process of 101and 102 together comprise the back titration of silver ions. Measurementof this first endpoint can be used to calculate the concentration ofsilver ions in the sample electrodeposition solution. Further metallicsalt (Me⁺) of predetermined concentration is added to theelectrodeposition solution to cause a reaction between at least aportion of the metallic salt (Me+) and substantially all of thecomplexing agent in the electrodeposition solution 103. The process of103 is the titration of complexing agent. Measurement of this secondendpoint can be used to calculate the concentration of complexing agentin the sample electrodeposition solution.

As used herein, the term “substantially all” means at least 85% of aparticular amount or subject.

The phrase “predetermined concentration” refers to a known, target, oroptimum concentration of a component in solution.

As used herein, the term “about” or “approximately” means within anacceptable error range for the particular value as determined by one ofordinary skill in the art, which will depend in part on how the value ismeasured or determined, i.e., the limitations of the measurement system.For example, “about” can mean a range of up to 20%, up to 10%, up to 5%,and or up to 1% of a given value.

As embodied herein, a sample of SnAg electrodeposition solution can beprepared using commercially available plating baths. For example, thesample can be prepared by diluting a predetermined amount of SnAgelectrodeposition solution with deionized water. In certain embodiments,the dilution ratio can range from no dilution to 1:1000, from 1:2 to1:500, from 1:5 to 1:250, or from 1:10 to 1:100. Additionally, nitricacid can be added to aid the reaction and sensor responses of anapparatus taking measurements of the electrodeposition solution.

In an exemplary embodiment, given a sample SnAg electrodepositionsolution, where the concentration of silver ions and the concentrationof a complexing agent are unknown, a precipitating agent, designated asX⁻, of predetermined concentration, is added to the electrodepositionsolution such that substantially all of the silver ions are precipitatedout of solution as an insoluble compound, AgX.

[Ag-Complexer]⁺+X⁻→AgX(s)+Complexer  (2)

The precipitating agent X⁻ should possess a stronger affinity for silverions than the complexing agent, meaning when the electrodepositionsolution contains both silver ions and complexing agent, the precipitantagent X⁻ will always preferentially react with silver ions instead ofcomplexing agent.

The anion of the precipitating agent X⁻ can be selected from the groupconsisting of Cl⁻, Br⁻, I⁻, PO₄ ³⁻, CN⁻, C₂O₄ ²⁻, S²⁻, F⁻, SO₄ ²⁻, CO₃²⁻, or BH₄ ⁻. In a preferred embodiment, the precipitating agentcomprises potassium iodide, KI.

As shown in reaction (2), when the silver ions are converted toinsoluble precipitant form, substantially all of the complexing agentbound to silver ions are released into solution. Next, theelectrodeposition solution containing freed complexing agent is titratedwith a metallic salt, designated as Me⁺. Similarly, precipitant agent X⁻should possess a stronger affinity for the metallic salt Me⁺ than forthe complexing agent, such that the precipitant agent X⁻ will alwayspreferentially react with metallic salt Me⁺ instead of complexing agent.The following reaction dominates until any or substantially all excessprecipitating agent X⁻ is neutralized.

X⁻+Me⁺→MeX  (3)

The cation of the metallic salt Me⁺ can be selected from the groupconsisting of Ag, Fe, In, Th, Sc, Hg, Ga, Lu, VO, Cu, Zn, Al, LA, Mn,Ca, Sr, Mg, Ni, Pb, Cd, or Co. The cation of the metallic salt can alsonot be a Group I metal. In a preferred embodiment, the metallic saltcomprises silver nitrate, AgNO₃.

The first endpoint of the back titration process, comprising ofreactions (2) and (3) together, is inversely correlated to the silverion concentration in solution. The more silver ions present in thesample electrodeposition solution, the smaller amount of precipitatingagent X⁻ will remain after all the silver ions are precipitated out asAgX. Thus, less metallic salt Me⁺ will be required to react with theremaining precipitating agent X⁻ still in the electrodepositionsolution.

FIG. 2 shows a titration curve and differentiated titration curve of thepotential of a silver ion-selective electrode as a function of thevolume of metallic salt titrant solution. This (first) titrationendpoint is indicated by the asymptotic and drastic increase in thederivative curve. The first endpoint provides a measure of and can beused to calculate the silver ion concentration in the plating bath. InFIG. 2, a blank sample solution, containing no silver ions, is used.Thus, precipitating agent X⁻ was not consumed as per reaction (2), andonly consumed in reaction (3) with metallic salt Me⁺.

Next, after the precipitating agent X⁻ is neutralized from reaction (3),the same metallic salt Me⁺ is further added to the sampleelectrodeposition solution until substantially all the complexing agentis reacted.

Complexer+Me⁺→[Me-Complexer]⁺  (4)

This second endpoint of the titration in reaction (4) directlycorrelates to the concentration of complexing agent. If more complexingagent is present, the more metallic salt Me⁺ is required to bind to it.

FIG. 3 shows a titration curve and differentiated titration curve of thepotential of a silver ion-selective electrode as a function of thevolume of metallic salt (Me⁺) titrant solution. In FIG. 3, the firstendpoint provides a measure of the silver ion concentration, and thesecond endpoint provides a measure of the total complexing agentconcentration in the plating bath. FIG. 3 represents the single,dual-step titration method presently disclosed.

The first and second endpoints can be determined, but not limited to,changes based on potential of ion selective electrode, conductivity,temperature, spectra (e.g., color), or electrochemical response. Forexample, endpoints can be measured using silver ion-selectiveelectrodes.

The presently disclosed subject matter can include an apparatus fordetermining the concentrations of silver ions and complexing agent in anelectroplating bath. In certain embodiments, an apparatus, such as ananalyzer, can be used to monitor and measure the concentrations ofsilver ions and complexing agent in a Sn—Ag electrodeposition solution.

FIG. 4 shows a non-limiting exemplary diagram of an analyzer of thepresently disclosed subject matter. In certain embodiments, analyzer 400includes an analysis cell 405 for containing an analysis solution 408, asampling device 401 for adding a predetermined volume of sample of theelectrodeposition solution into analysis cell 405, a precipitating agentinjector 402 for adding a predetermined volume of a solution with aknown concentration of a precipitating agent into analysis cell 405, atitrator device 403 for adding an aliquot of a known volume of a titrantsolution to analysis cell 405, and a sensor 409 for monitoringproperties of analysis solution 408. In certain embodiments, analyzer400 can further include a controller 410 in communication with at leastone of analysis cell 405, sampling device 401, precipitating agentinjector 402, titrator device 403, and sensor 409. In certainembodiments, analyzer 400 can further include one or more optionalinlets 404 for introducing additional reagents. In certain embodiments,analyzer 400 can further include a solution stirring device 406 forstirring analysis solution 408. In certain embodiments, analyzer 400 canfurther include a cell cleaning device 407 for reducingcross-contamination between analysis.

The design of analysis cell 405 can depend on various considerations,including analysis methods, precision requirements, and level ofautomation. Depending on need of the application, analysis cell 405 canbe of different capacity ranging from a few milliliters to a few liters.The sampled amount of electrodeposition solution can vary accordingly.Analysis cell 405 can be a simple beaker or a closed cell. Analysis cell405 can be made from various chemical resistant materials includingglass, plastic, and stainless steel. Analysis cell 405 can be ofdifferent shapes that facilitate the analysis operations. For example,the analysis cell 405 can be cylindrical. In certain embodiment analysiscell 405 can include an optical window to be used in conjunction with anoptical spectroscopic sensor.

In certain embodiments, sampling device 401, precipitating agentinjector 402, titrator device 403, and optional inlets 404 can eachcomprise a suitable solution metering device. Such a solution meteringdevice can include a metering pump, a syringe, or other devices known inthe art. In certain embodiment, precipitating agent injector 402,titrator device 403, and optional inlets 404 can each include a pumpand/or valve that controls delivery from a pressurized supply.

Sensor 409 can include various types of sensor for monitor changes inanalysis solution 408. Such changes can include electrochemicalpotential, conductivity, temperature, or color changes. In certainembodiments, sensor 409 can be an ion selective electrode, conductivitymeter, thermometer, or UV/visible spectrometer. In certain embodiments,sensor 409 can include a silver ion-selective electrode.

Solution stirring device 406 can be used to stir analysis solution 408to improve solution uniformity and analysis precision. In certainembodiments, solution stirring device 406 can include a magnetic stirrercoupled a with a magnetic stir bar. In certain embodiments, solutionstirring device 406 can include an impeller driven by an electricalstirring motor, a gas bubbler, an ultrasonic wave generator, or asolution circulator.

One or more optional inlets 404 can be used to introduce additionalreagents into the analysis solution 408. In certain embodiments, theadditional reagents can include deionized water as diluent. In certainembodiments, the additional reagents can include nitric acid, HNO₃, toaid in reaction and sensor response, which does not need to be in astoichiometric ratio with other reagents or with the electrodepositionsolution.

In certain embodiments, cell cleaning device 407 can rinse analysis cell405 with purified water (pumped into the cell) and collects the rinsewater for subsequent disposal. In certain embodiments, cell cleaningdevice 407 can further blow dry analysis cell 405 to further reducecross-contamination between subsequently analyses.

In certain embodiments, analyzer 400 further include controller 410. Incertain embodiments, controller 410 is configured to communicate with orcontrol one or more components including analysis cell 405, samplingdevice 401, precipitating agent injector 402, titrator device 403,sensor 409, stirring device 406, and optional inlets 404. In certainembodiments, controller 410 can include one or more processors, coupledto a computer-readable medium containing executable instructions thatcan be executed by the processors.

In certain embodiments, the controller can be configured to causesampling device 401 to add a predetermined volume of theelectrodeposition solution to analysis cell 405; cause precipitatingagent injector 402 to add a precipitating agent (X⁻) having apredetermined concentration to the electrodeposition solution to cause areaction between at least a portion of the precipitating agent (X⁻) andsubstantially all of the silver ions (Ag⁺) in analysis solution 408 suchthat substantially all of silver ions (Ag⁺) are precipitated out fromthe analysis solution 408 as a precipitant (AgX); cause titrator device403 to add an amount of the titrant solution to analysis solution 408 toreach a first endpoint of titration, where the titrant has reacted withsubstantially all of the precipitating agent (X⁻) remaining in analysissolution 408; cause titrator device 403 to further add another amount ofthe titrant solution to the analysis solution to reach a second endpointof titration where the titrant has reacted with substantially all of thecomplexing agent in analysis solution 408; determine the first endpointand the second endpoint of titration based on an output of sensor 409;and calculate concentrations of silver ions (Ag⁺) and complexing agentin the electrodeposition solution.

In certain embodiments, controller 410 is further configured to controlsolution stirring device 406. In certain embodiments, controller 410 isconfigured to control optional inlets 404. In certain embodiments,controller 410 is configured to control cell cleaning device 407.

In certain embodiments, analyzer 400 of the presently disclosed subjectmatter is not limited to monitoring and measurements of silver ions andcomplexing agent. In certain embodiments, analyzer 400 can also measureand monitor, for example, but by no means as a limitation, the amountsof tin(II) (Sn²⁺) or tin(IV) (Sn⁴⁺) ions, amounts of other acid oracidic reagents, pH, amounts of primary polarizer, and amounts ofsecondary polarizer, and optionally, amounts of antioxidant, tin ionbreakdown contaminant, and leached photoresist contaminant.

The presently disclosed subject matter can include a process controlsystem. For example, but by no means as a limitation, such a processcontrol system can include an analyzer as disclosed above and areplenishing system to maintain steady concentrations of silver ions andcomplexing agent in an electroplating bath. During electroplating, tinions, silver ions, complexing agent, and other plating bath componentsare depleted or break down over time and require replenishing in orderto maintain a consistent electrodeposition process. In certainembodiments, the replenishing system replenishes the electroplating bathbased on the concentrations of the silver ions and complexing agentdetermined by the analyzer.

In one embodiment, the process control system can include an analyzerfor determining the concentrations of silver ions and complexing agentin an electrodeposition solution, a replenishing system for adding oneor more reagents to the electrodeposition solution; one or moreprocessors coupled to the analyzer and replenishing system; and acomputer-readable medium containing executable instructions. Whenexecuted by the one or more processors, the executable instructions cancause the process control system to determine the concentrations ofsilver ions and complexing agent by acquiring a sample of theelectrodeposition solution, adding a precipitating agent ofpredetermined concentration to precipitate substantially all of thesilver ions as a precipitant AgX, titrating the precipitating agent thatremains in the sample with a metallic salt, further titrating thecomplexing agent with metallic salt, and adding one or more reagents tothe electrodeposition solution to maintain a predetermined concentrationof silver ions and complexing agent.

The presently disclosed subject matter will be better understood byreference to the following Examples, which are provided as exemplary ofthe present disclosure and not by way of limitation.

Example 1: Monitoring Ag⁺ and Complexing Agent Concentrations ViaDual-Step Titration

In this example, a test sample Sn—Ag electrodeposition solutioncontained the following concentrations: 50 g/l of tin(II) ions (Sn²⁺),150 g/l of methanesulfonic acid (MSA), 0.5 g/l of silver ions (Ag⁺), and5 g/l of thiourea complexing agent. The tin ions and silver ions wereadded into the electrodeposition solution as MSA salts.

A test sample of 0.5 ml of the electrodeposition solution was firsttreated with 2 ml of 0.01 normality potassium iodide, KI. Then the testsample was titrated with 0.01 normality silver nitrate, AgNO₃. Potentialwas measured by a silver ion-selective electrode. Data was collectedusing a Qualilab® QL-100EZ benchtop analyzer manufactured by ECITechnology.

FIG. 3 represents the titration curve and differentiated titration curveof the potential of the silver ion-selective electrode as a function ofthe volume of AgNO₃.

Example 2: Comparison of Prior Art Method and Present Disclosure Method

A series of analyses were performed using a certain “free complexer”method currently known in the art and compared to an example inaccordance with the presently disclosed subject matter. In the “freecomplexer” method, total complexing agent concentration is calculatedbased on the amount of free (unreacted) complexer concentration insolution plus the amount of silver ion concentration, using a predefinedratio or binding factor. See reaction (5).

In Example 2, three solutions were each analyzed ten times (i.e., 10trials) under the “free complexer” method and the method of the presentdisclosure. The Sn—Ag electrodeposition solution used was SolderOn™ BPTS 6000, a commercially available electrolyte plating bath manufacturedby Dow®. The concentrations of silver ions and complexing agent werevaried in the electrodeposition solutions as follows:

-   -   Solution 1: 0.2 g/l of Ag⁺ and 20 ml/l of Complexer    -   Solution 2: 0.3 g/l of Ag⁺ and 30 ml/l of Complexer    -   Solution 3: 0.4 g/l of Ag⁺ and 40 ml/l of Complexer

Data was collected using Quali-Fill™ QFDS-1000E automatic chemicalmanagement system manufactured by ECI Technology. The results weretabulated as follows:

TABLE I Free Complexer (Prior Art) Data Points Solution 1 Solution 2Solution 3 1 10.85 15.39 20.76 2 11.68 16.08 21.34 3 11.72 15.34 21.25 411.38 15.33 20.93 5 11.91 16.05 20.87 6 11.63 15.77 20.68 7 10.84 15.3920.92 8 11.67 15.57 20.91 9 11.09 15.53 20.83 10  11.15 15.51 21.04Average 11.39 15.60 20.95 Expected 11.00 16.50 22.00 Accuracy 3.56 −5.48−4.76 StDev 0.39 0.28 0.21 RSD 3.39 1.79 0.98

TABLE II Corresponding Ag⁺ (Prior Art) Data Points Solution 1 Solution 2Solution 3 1 0.205 0.296 0.4 2 0.211 0.298 0.4 3 0.209 0.295 0.4 4 0.2060.295 0.397 5 0.212 0.296 0.401 6 0.209 0.295 0.401 7 0.206 0.295 0.4018 0.217 0.295 0.401 9 0.208 0.297 0.402 10  0.206 0.297 0.402 Average0.21 0.30 0.40 Expected 0.20 0.30 0.40 Accuracy 4.45 −1.37 0.12 StDev0.00 0.00 0.00 RSD 1.75 0.37 0.36

In Tables I and II above, as well as Tables III, IV, and V below, the 10trials of each of the three solution concentrations are tabulated. An“Average” is calculated for each solution based on the 10 separatetrials. This “Average” is compared to the “Expected” target amount, anda subsequent level of “Accuracy” as a percentage above (+) or below (−)target. The standard deviation (“StDev”) and relative standard deviation(“RSD”) are accordingly tabulated.

Given the amount of free complexer and measured silver ions, the totalcomplexer in the electrodeposition solution can be calculated by amathematical relationship as follows:

Total Complexer=Free Complexer+Binding Factor×Measured Ag Ions  (5)

TABLE III Total Complexer (Prior Art) Data Points Solution 1 Solution 2Solution 3 1 20.075 28.71 38.76 2 21.175 29.49 39.34 3 21.125 28.61539.25 4 20.65 28.605 38.795 5 21.45 29.37 38.915 6 21.035 29.045 38.7257 20.11 28.665 38.965 8 21.435 28.845 38.955 9 20.45 28.895 38.92 10 20.42 28.875 39.13 Average 20.79 28.91 38.98 Expected 20.00 30.00 40.00Accuracy 3.96 −3.63 −2.56 StDev 0.52 0.31 0.21 RSD 2.49 1.06 0.53

Using the methods disclosed by the present subject matter, no additionalcalculation step was required to determine the total complexerconcentration. The results were as follows:

TABLE IV Corresponding Ag⁺ (New Method) Data Points Solution 1 Solution2 Solution 3 1 0.203 0.304 0.403 2 0.203 0.302 0.401 3 0.201 0.294 0.4014 0.201 0.304 0.399 5 0.209 0.304 0.4 6 0.199 0.3 0.397 7 0.196 0.3060.391 8 0.211 0.303 0.398 9 0.211 0.304 0.395 10  0.211 0.308 0.402Average 0.20 0.30 0.40 Expected 0.20 0.30 0.40 Accuracy 2.25 0.97 −0.33StDev 0.01 0.00 0.00 RSD 2.72 1.25 0.91

TABLE V Total Complexer (New Method) Data Points Solution 1 Solution 2Solution 3 1 20.63 30.87 40.17 2 20.3 30.05 40.07 3 20.73 30.17 40.2 420.68 30.55 39.96 5 20.16 30.69 40.21 6 20.52 30.51 39.27 7 21.06 29.9240.27 8 20.67 29.88 39.33 9 20.59 29.67 39.03 10  20.38 29.64 39.21Average 20.27 30.20 39.77 Expected 20.00 30.00 40.00 Accuracy 1.35 0.65−0.57 StDev 0.25 0.44 0.50 RSD 1.24 1.44 1.25

A summary of the performance of each method in Table VI below indicatedthe methods of the present disclosure yielded better accuracy inmeasuring concentrations of both silver ions and complexing agent.(Accuracy spread refers to the difference in accuracy between the threetest solutions. While a constant shift in accuracy can be compensatedthrough a constant bias correction, a variable shift is difficult tocounterbalance.)

TABLE VI Prior Art Invention Component Ag⁺ Total Complexer Ag⁺ TotalComplexer Accuracy, % −1.37 . . . +4.45% −2.56 . . . +3.96% −0.33 . . .+2.25% −0.57 . . . +1.35% Accuracy 5.82% 6.52% 2.58% 1.92% Spread, %Relative Standard 0.36-1.75% 0.53-2.49% 0.91-2.72% 1.24-1.44% Deviation,%

Thus, the present disclosure provides a superior analytical performancefor monitoring the concentration of complexing agent, and at least equalor better performance for monitoring the concentration of silver ions.

In addition to the various embodiments depicted and claimed, thedisclosed subject matter is also directed to other embodiments havingother combinations of the features disclosed and claimed herein. Assuch, the particular features presented herein can be combined with eachother in other manners within the scope of the disclosed subject mattersuch that the disclosed subject matter includes any suitable combinationof the features disclosed herein. The foregoing description of specificembodiments of the disclosed subject matter has been presented forpurpose of illustration and description. It is not intended to beexhaustive or to limit the disclosed subject matter to those embodimentsdisclosed.

It will be apparent to those skilled in the art that variousmodifications and variations can be made in the systems and methods ofthe disclosed subject matter without departing from the spirit or scopeof the disclosed subject matter. Thus, it is intended that the disclosedsubject matter include modifications and variations that are within thescope of the appended claims and their equivalents.

What is claimed is:
 1. An apparatus for analyzing concentrations ofsilver ions (Ag⁺) and complexing agent of an electrodeposition solution,comprising: an analysis cell configured to contain an analysis solution;at least one sampling device; a precipitating agent injector; a titratordevice configured to add a titrant solution of predeterminedconcentration to the analysis solution; a sensor for detecting a changein the analysis solution; and a controller comprising one or moreprocessors, coupled to the at least one sampling device, theprecipitating agent injector, the titrator device, and the sensor;wherein, the controller is configured to (a) cause the sampling deviceto add a predetermined volume of the electrodeposition solution to theanalysis solution; (b) cause the precipitating agent injector to add aprecipitating agent (X⁻) having a predetermined concentration to theelectrodeposition solution to cause a reaction between at least aportion of the precipitating agent (X⁻) and substantially all of thesilver ions (Ag⁺) in the analysis solution such that the substantiallyall of silver ions (Ag⁺) are precipitated out from the analysis solutionas a precipitant (AgX); (c) cause the titrator device to add a firstamount of the titrant solution to the analysis solution to reach a firstendpoint of titration, where the titrant has reacted with substantiallyall of the precipitating agent (X⁻) remaining in the analysis solution;(d) cause the titrator device to further add a second amount of thetitrant solution to the analysis solution to reach a second endpoint oftitration where the titrant has reacted with substantially all of thecomplexing agent in the analysis solution; and (e) determine the firstendpoint and the second endpoint of titration based on an output of thesensor.
 2. The apparatus of claim 1, wherein the titrant comprises ametallic salt.
 3. The apparatus of claim 2, wherein a cation of themetallic salt (Me⁺) is selected from the group consisting of Ag, Fe, In,Th, Sc, Hg, Ga, Lu, VO, Cu, Zn, Al, LA, Mn, Ca, Sr, Mg, Ni, Pb, Cd, orCo.
 4. The apparatus of claim 1, wherein the metallic salt comprisessilver nitrate, AgNO₃.
 5. The apparatus of claim 1, wherein the changein the analysis solution comprises one or more of conductivity,temperature, color, and electrochemical potential.
 6. The apparatus ofclaim 1, wherein the sensor comprises one or more of potential ofion-selective electrode, conductivity sensor, temperature sensor, andcolor spectral sensor.
 7. The apparatus of claim 1 further comprises oneor more optional inlets.
 8. The apparatus of claim 7, wherein the one ormore optional inlets are configured to introduce a diluent into theanalysis cell.
 9. The apparatus of claim 8, wherein the diluentcomprises deionized water.
 10. The apparatus of claim 7, wherein the oneor more optional inlets are configured to introduce an optional reagentinto the analysis cell.
 11. The apparatus of claim 10, wherein theoptional reagent comprises nitric acid.
 12. A process control systemthat controls concentrations of silver ions (Ag⁺) and complexing agentin an electrodeposition solution including at least tin ions, silverions, and complexing agent, comprising: an analyzer for determining theconcentrations of silver ions (Ag⁺) and complexing agent; a replenishingsystem for adding one or more agents to the electrodeposition solution;one or more processors, coupled to the analyzer and the replenishingsystem; and a computer-readable medium containing executableinstructions that when executed by the one or more processors, cause theprocess control system to: determine the concentrations of silver ions(Ag+) and complexing agent by acquiring a sample of theelectrodeposition solution, add a precipitating agent (X⁻) having apredetermined concentration to the sample that causes the precipitationof substantially all of the silver ions (Ag⁺) as a precipitant (AgX),and titrate the precipitating agent (X⁻) that remains in the sample witha metallic salt (Me), and further titrate the complexing agent withmetallic salt (Me⁺), and add one or more reagents to theelectrodeposition solution to maintain predetermined concentrations ofsilver ions (Ag⁺) and complexing agent.